Fabrication of doped nano-electromechanical systems
Abstract
We present a new generation of nano-electromechanical systems (NEMS), which are realized by doping the semiconductor base material. In contrast to the traditional approach these doped NEMS (D-NEMS) do not require a metallization layer. This makes them far lighter and hence increases resonance frequency and quality factor. Additionally, D-NEMS can be tuned from the conductive state into an insulating one. This will enable a host of new device designs, like mechanically tunable pin-junctions and nanomechanical single electron switches. We demonstrate D-NEMS fabrication and operation from the intrinsic, to the light, and to the heavy regime of doping.
- Publication:
-
Physica Status Solidi Rapid Research Letters
- Pub Date:
- October 2007
- DOI:
- 10.1002/pssr.200701186
- arXiv:
- arXiv:0708.1296
- Bibcode:
- 2007PSSRR...1..205S
- Keywords:
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- Condensed Matter - Mesoscale and Nanoscale Physics;
- Condensed Matter - Materials Science
- E-Print:
- 4 pages, 4 figures