Laser machined ultrathin microscale platinum thermometers on transparent oxide substrates
Abstract
A 50 μm sized, 50 nm thick Pt thin film temperature sensor is machined with femtosecond laser. The sensor can function at 650 °C with high repeatability. We studied the Temperature Coefficient of Resistance (TCR) stability with various substrates and capping layers. In-situ resistance monitoring facilitated the identification of degradation and its optimization.
- Publication:
-
Sensors and Actuators A: Physical
- Pub Date:
- December 2019
- DOI:
- 10.1016/j.sna.2019.111657
- arXiv:
- arXiv:1905.09812
- Bibcode:
- 2019SeAcA.30011657W
- Keywords:
-
- Platinum;
- Thin film;
- Temperature sensor;
- Laser machining;
- In-Situ;
- Physics - Instrumentation and Detectors
- E-Print:
- doi:10.1016/j.sna.2019.111657