Time evolution of the process of doping of solids by plasma-ion beams

Irradiation of a solid with intense plasma ion beams produced by Rod Plasma Injector is a strongly nonequilibrium process, which enables achieving a number of effects which are impossible to be achieved with other method. In the paper, the process of plasma ion beam propagation regarding its time and energy distributions and the process of ion penetration of solids, resulting with ion implementation and temperature growth have been analyzed mathematically on basis of experimental data. Results of numerical calculations have been presented concerning temperature and dopant density time evolution.