Features of combining scanning probe microscope with optical and scanning electron microscopes
Abstract
The designs of combining a scanning probe microscope (SPM) with an optical microscope (OM) or scanning electron microscope (SEM) have been presented. To reduce the size of the SPM units the self-sensing probes and a piezo-inertial displacement system are proposed to use. The peculiarities of working of such SPM units are discussed. The examples of visualization of different nature objects in combined systems SPM-OM and SPM-SEM have been presented.
- Publication:
-
Materials Science and Engineering Conference Series
- Pub Date:
- December 2019
- DOI:
- 10.1088/1757-899X/699/1/012040
- Bibcode:
- 2019MS&E..699a2040S