Status and prospects of plasma-assisted atomic layer deposition Knoops, Harm C. M. ; Faraz, Tahsin ; Arts, Karsten ; Kessels, Wilhelmus M. M. (Erwin) Abstract Publication: Journal of Vacuum Science Technology A: Vacuum Surfaces and Films Pub Date: May 2019 DOI: 10.1116/1.5088582 Bibcode: 2019JVSTA..37c0902K