A Silicon MEMS EM vibration energy harvester
Abstract
This paper presents an optimized silicon-MEMS electromagnetic vibration energy harvester suitable for applications such as machine health monitoring. The harvester comprises a DRIE-etched silicon suspension, and pick-and-place N42 NdBFe magnets and copper coils, housed in a 3D-printed package. The harvester is designed to operate near 50 Hz with 0.5-1 g vibrations using a long-stroke suspension. Multi-domain harvester optimization results in an open-circuit voltage of 1.7 V, a matched-load power output of 2.2 mW, and a matched-load power-output density of 1.23 mW/cm3 at 1.1 g with a resonance frequency of 76.3 Hz.
- Publication:
-
Journal of Physics Conference Series
- Pub Date:
- November 2019
- DOI:
- 10.1088/1742-6596/1407/1/012022
- arXiv:
- arXiv:1910.02131
- Bibcode:
- 2019JPhCS1407a2022Y
- Keywords:
-
- Physics - Applied Physics;
- Electrical Engineering and Systems Science - Signal Processing;
- Electrical Engineering and Systems Science - Systems and Control
- E-Print:
- PowerMEMS 2018 conference