Given a finite collection of $C^1$ vector fields on a $C^2$ manifold which span the tangent space at every point, we consider the question of when there is locally a coordinate system in which these vector fields are real analytic. We give necessary and sufficient, coordinate-free conditions for the existence of such a coordinate system. Moreover, we present a quantitative study of these coordinate charts. This is the third part in a three-part series of papers. The first part, joint with Stovall, lay the groundwork for the coordinate system we use in this paper and showed how such coordinate charts can be viewed as scaling maps for sub-Riemannian geometry. The second part dealt with the analogous questions with real analytic replaced by $C^\infty$ and Zygmund spaces.