In-Ga-Zn-O thin films with tunable optical and electrical properties prepared by high-power impulse magnetron sputtering - NASA/ADS

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NASA/ADS

In-Ga-Zn-O thin films with tunable optical and electrical properties prepared by high-power impulse magnetron sputtering

Publication:: Thin Solid Films
Pub Date:: July 2018
DOI:: 10.1016/j.tsf.2018.05.029
Bibcode:: 2018TSF...658...27R

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