Image reversal reactive immersion lithography improves the detection limit of focal molography Frutiger, Andreas ; Tschannen, Cla Duri ; Blickenstorfer, Yves ; Reichmuth, Andreas M. ; Fattinger, Christof ; Vörös, Janos Abstract Publication: Optics Letters Pub Date: December 2018 DOI: 10.1364/OL.43.005801 Bibcode: 2018OptL...43.5801F