An experimental system of wide-range two dimensional Rutherford backscattering analysis in vacuum chamber
Rutherford backscattering spectrometry (RBS) analysis is a widely used ion beam analysis technique to obtain the concentration and/or thickness of the target. In some cases we have to utilize the large area target, for example, about 40 mm diameter target in our 12 C(α , γ) 16 O experiment of Jinping Underground laboratory for Nuclear Astrophysics (JUNA) project, it means that we should perform wide-range two dimensional (2D) RBS analyses for tens of points in the large area target to obtain the elemental area (or 2D) depth profile distribution which is needed in the 12 C(α , γ) 16 O experiment. In order to perform the large area target RBS analysis in vacuum chamber accurately and efficiently, an experimental system was developed in this work, which included (1) a 2D moving sample stage in vacuum chamber for precisely positioning points to be analyzed in target, (2) synchronously starting spectrum acquisition when the sample stage is located at the measurement point and saving the corresponding spectrum when the acquisition is finished by utilizing the job control script of ORTEC MAESTRO software, and (3) using the Object Linking and Embedding (OLE) automation of SIMNRA software to perform batch analysis for tens of experimental RBS spectra. The experimental system developed in this work and corresponding demonstration results were described in detail in this paper. The experimental system developed here can also be used in other research fields.