Correlative Defect Characterization in Semiconductors via Electron Channeling Contrast Imaging and Scanning Deep Level Transient Spectroscopy
Abstract
- Publication:
-
Microscopy and Microanalysis
- Pub Date:
- August 2018
- DOI:
- 10.1017/S1431927618005767
- Bibcode:
- 2018MiMic..24S1056G