Membrane-capacitive transducer with compensation for the primary standard of pressure
Abstract
The paper discusses improvements for the primary vacuum-meter transducer for measuring absolute pressure in a wide range from 0.1 to 10 Pa.
- Publication:
-
Materials Science and Engineering Conference Series
- Pub Date:
- July 2018
- DOI:
- 10.1088/1757-899X/387/1/012002
- Bibcode:
- 2018MS&E..387a2002A