Wafer-Scale Fabrication of Recessed-Channel PtSe2 MOSFETs With Low Contact Resistance and Improved Gate Control
Abstract
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- October 2018
- DOI:
- 10.1109/TED.2018.2856305
- Bibcode:
- 2018ITED...65.4102L