Chip-scale atomic devices

Chip-scale atomic devices combine elements of precision atomic spectroscopy, silicon micromachining, and advanced diode laser technology to create compact, low-power, and manufacturable instruments with high precision and stability. Microfabricated alkali vapor cells are at the heart of most of these technologies, and the fabrication of these cells is discussed in detail. We review the design, fabrication, and performance of chip-scale atomic clocks, magnetometers, and gyroscopes and discuss many applications in which these novel instruments are being used. Finally, we present prospects for future generations of miniaturized devices, such as photonically integrated systems and manufacturable devices, which may enable embedded absolute measurement of a broad range of physical quantities.