Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser
Abstract
We demonstrate fabrication of a high-quality factor lithium niobate double-disk whispering-gallery microcavity using femtosecond laser assisted ion beam milling. Using this method, two vertically stacked 30-µm diameter disks with a 200-nm gap are fabricated. With our device, an optical quality factor as high as 1.35 × 105 is demonstrated. Our approach is scalable to fabricate multiple disks on a single chip.
- Publication:
-
International Journal of Optomechatronics
- Pub Date:
- January 2017
- DOI:
- 10.1080/15599612.2017.1406024
- arXiv:
- arXiv:1712.01365
- Bibcode:
- 2017IJO....11...47F
- Keywords:
-
- Double disk;
- integrated optics;
- lithium niobate;
- microfabrication;
- microresonator;
- Physics - Applied Physics;
- Physics - Optics
- E-Print:
- 17 pages, 4 figures