Self-aligned formation of the trench bottom shielding region in 4H-SiC trench gate MOSFET Kojima, Takahito ; Harada, Shinsuke ; Kobayashi, Yusuke ; Sometani, Mitsuru ; Ariyoshi, Keiko ; Senzaki, Junji ; Takei, Manabu ; Tanaka, Yasunori ; Okumura, Hajime Abstract Publication: Japanese Journal of Applied Physics Pub Date: April 2016 DOI: 10.7567/JJAP.55.04ER02 Bibcode: 2016JaJAP..55dER02K