Improving Precision, Maintaining Accuracy, and Reducing Acquisition Time for Trace Elements in EPMA

Trace element precision in electron probe micro analysis (EPMA) is limited by intrinsic random variation in the x-ray continuum. Traditionally we characterize background intensity by measuring on either side of the emission line and interpolating the intensity underneath the peak to obtain the net intensity. Alternatively, we can measure the background intensity at the on-peak spectrometer position using a number of standard materials that do not contain the element of interest. This so-called mean atomic number (MAN) background calibration (Donovan, et al., 2016) uses a set of standard measurements, covering an appropriate range of average atomic number, to iteratively estimate the continuum intensity for the unknown composition (and hence average atomic number). We will demonstrate that, at least for materials with a relatively simple matrix such as SiO2, TiO2, ZrSiO4, etc. where one may obtain a matrix matched standard for use in the so called "blank correction", we can obtain trace element accuracy comparable to traditional off-peak methods, and with improved precision, in about half the time. Donovan, Singer and Armstrong, A New EPMA Method for Fast Trace Element Analysis in Simple Matrices ", American Mineralogist, v101, p1839-1853, 2016 Figure 1. Uranium concentration line profiles from quantitative x-ray maps (20 keV, 100 nA, 5 um beam size and 4000 msec per pixel), for both off-peak and MAN background methods without (a), and with (b), the blank correction applied. We see precision significantly improved compared with traditional off-peak measurements while, in this case, the blank correction provides a small but discernable improvement in accuracy.