Role of the buffer at the interface of intrinsic a-Si:H and p-type a-Si:H on amorphous/crystalline silicon heterojunction solar cells
We investigate the influence of the different buffer at the interface between the intrinsic a-Si:H and p-type a-Si:H layers on amorphous/crystalline silicon heterojunction (SHJ) solar cells performance. It is demonstrated that the ultrathin buffer at interface of intrinsic a-Si:H and p-type a-Si:H, obtained by H-rich plasma treatment on the initial intrinsic a-Si:H passivation layer, can significantly enhance the minority carrier lifetime and decrease the emitter saturation current density. Spectroscopic ellipsometry and Fourier transform infrared spectroscopy analyses indicate that the initial intrinsic a-Si:H films become dense and less defected as a result of the relaxation and reconstruction when they are treated during the H-rich plasma environment. Based on this finding combined with the optimization of surface texturization of the silicon wafer, this work allows us to reach very high Voc values over 730 mV without losses on fill factor, the 100 μm, 125 × 125 mm2 SHJ solar cells were fabricated with industry-compatible process, yielding the efficiency up to 22.5%.