The effect of isochronal annealing on vacancy-type defects in quenched FeCrNi alloys and SUS316 was investigated via positron annihilation technique. Vacancy-type defects clustered and grew with increasing annealing temperatures of up to 523 K and, in FeCrNi alloys, were gradually annihilated with increasing temperature. The annihilation temperature was relatively insensitive to the addition of Mo and nonmetal elements, and after annealing at 673 K, the vacancy-type defects were annihilated and dislocation-type defects were formed in all of the alloys. In addition, due to the formation of Mo-vacancy complexes, the density of defects in the Mo-diluted FeCrNi model alloy was lower than that in the FeCrNi model alloy. The long lifetime of vacancy-type defects in commercial stainless steel SUS316 was smaller than that in the FeCrNi model alloys due to the nonmetal-element-induced change in mobility of the defects. Moreover, the vacancy-type and dislocation-type defects contributed to the S and W parameters of positron annihilation during the entire annealing treatment.