Room temperature deposition of high figure of merit Al-doped zinc oxide by pulsed-direct current magnetron sputtering: Influence of energetic negative ion bombardment on film's optoelectronic properties
Abstract
- Publication:
-
Thin Solid Films
- Pub Date:
- October 2014
- DOI:
- 10.1016/j.tsf.2014.08.023
- Bibcode:
- 2014TSF...569...44F