Source/drain induced defects in advanced MOSFETs: what device electrical characterization tells Mouis, Mireille ; Lee, Jae Woo ; Jeon, Daeyoung ; Shi, Ming ; Shin, Minju ; Ghibaudo, Gérard Abstract Publication: Physica Status Solidi C Current Topics Pub Date: January 2014 DOI: 10.1002/pssc.201300317 Bibcode: 2014PSSCR..11..138M