Two-photon–induced internal modification of silicon by erbium-doped fiber laser Verburg, P. C. ; Römer, G. R. B. E. ; Huis in 't Veld, A. J. Abstract Publication: Optics Express Pub Date: September 2014 DOI: 10.1364/OE.22.021958 Bibcode: 2014OExpr..2221958V