Energy-Filtered Transmission Electron Microscope Tomography of Silicon Nanoparticles in Silicon Dioxide Deposited with High Density Plasma Chemical Vapor Deposition
Abstract
- Publication:
-
Microscopy and Microanalysis
- Pub Date:
- August 2014
- DOI:
- 10.1017/S1431927614005777
- Bibcode:
- 2014MiMic..20S.810B