3D Analytical TEM Approach to Effectively Characterize 3D-FinFET Device Features in Semiconductor Wafer-foundries
Abstract
- Publication:
-
Microscopy and Microanalysis
- Pub Date:
- August 2014
- DOI:
- 10.1017/S1431927614003535
- Bibcode:
- 2014MiMic..20S.362Z