High Throughput Fabrication Process of a Zernike Phase Plate Konyuba, Y. ; Iijima, H. ; Abe, Y. ; Suga, M. ; Ohkura, Y. Abstract Publication: Microscopy and Microanalysis Pub Date: August 2014 DOI: 10.1017/S1431927614002839 Bibcode: 2014MiMic..20S.222K