Inductively Coupling Plasma Reactor With Plasma Electron Energy Controllable in the Range From {∼}{6} to {∼}100 eV
Abstract
- Publication:
-
IEEE Transactions on Plasma Science
- Pub Date:
- March 2014
- DOI:
- 10.1109/TPS.2014.2299954
- Bibcode:
- 2014ITPS...42..774S