Extension of Planar Bulk n-Channel MOSFET Scaling With Oxygen Insertion Technology Xu, Nuo ; Takeuchi, Hideki ; Damrongplasit, Nattapol ; Stephenson, Robert J. ; Huang, Xiangyang ; Cody, Nyles W. ; Hytha, Marek ; Mears, Robert J. ; Liu, Tsu-Jae King Abstract Publication: IEEE Transactions on Electron Devices Pub Date: September 2014 DOI: 10.1109/TED.2014.2342496 Bibcode: 2014ITED...61.3345X