Leakage Control in 0.4-nm EOT Ru/SrTiOx/Ru Metal-Insulator-Metal Capacitors: Process Implications
Abstract
- Publication:
-
IEEE Electron Device Letters
- Pub Date:
- July 2014
- DOI:
- 10.1109/LED.2014.2322632
- Bibcode:
- 2014IEDL...35..753S