Nanosheet controlled epitaxial growth of PbZr0.52Ti0.48O3 thin films on glass substrates

Integration of PbZr_0.52Ti_0.48O₃ (PZT) films on glass substrates is of high importance for device applications. However, to make use of the superior ferro- and piezoelectric properties of PZT, well-oriented crystalline or epitaxial growth with control of the crystal orientation is a prerequisite. In this article, we report on epitaxial growth of PZT films with (100)- and (110)-orientation achieved by utilizing Ca₂Nb₃O₁₀ (CNO) and Ti_0.87O₂ (TO) nanosheets as crystalline buffer layers. Fatigue measurements demonstrated stable ferroelectric properties of these films up to 5 × 10⁹ cycles. (100)-oriented PZT films on CNO nanosheets show a large remnant polarization of 21 μC/cm² that is the highest remnant polarization value compared to (110)-oriented and polycrystalline films reported in this work. A piezoelectric response of 98 pm/V is observed for (100)-oriented PZT film which is higher than the values reported in the literature on Si substrates.