Thermal Probe Maskless Lithography for 27.5 nm Half-Pitch Si Technology Cheong, Lin Lee ; Paul, Philip ; Holzner, Felix ; Despont, Michel ; Coady, Daniel J. ; Hedrick, James L. ; Allen, Robert ; Knoll, Armin W. ; Duerig, Urs Abstract Publication: Nano Letters Pub Date: September 2013 DOI: 10.1021/nl4024066 Bibcode: 2013NanoL..13.4485C