Breakthroughs in Photonics 2012: Femtosecond-Laser Nanomachining Burmeister, F. ; Richter, S. ; Richter, D. ; Voigtlander, C. ; Heisterkamp, A. ; Nolte, S. Abstract Publication: IEEE Photonics Journal Pub Date: April 2013 DOI: 10.1109/JPHOT.2013.2252609 Bibcode: 2013IPhoJ...500506B