In-process measuring procedure for sub-100 nm structures Zimmermann, M. ; Tausendfreund, A. ; Patzelt, S. ; Goch, G. ; Kieß, S. ; Shaikh, M. Z. ; Gregoire, M. ; Simon, S. Abstract Publication: Journal of Laser Applications Pub Date: September 2012 DOI: 10.2351/1.4719936 Bibcode: 2012JLasA..24d2010Z