Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching
Abstract
Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.
- Publication:
-
Applied Physics Letters
- Pub Date:
- September 2012
- DOI:
- 10.1063/1.4750236
- Bibcode:
- 2012ApPhL.101j3503L
- Keywords:
-
- high-speed optical techniques;
- integrated optics;
- laser beam etching;
- microactuators;
- optical glass;
- self-induced transparency;
- silicon compounds;
- 42.50.Md;
- 42.70.Ce;
- 42.82.-m;
- 85.85.+j;
- 42.50.Gy;
- Optical transient phenomena: quantum beats photon echo free-induction decay dephasings and revivals optical nutation and self-induced transparency;
- Glasses quartz;
- Integrated optics;
- Micro- and nano-electromechanical systems and devices;
- Effects of atomic coherence on propagation absorption and amplification of light;
- electromagnetically induced transparency and absorption