Thermal instability of DLC film surface morphology - an AFM study
Abstract
The surface morphology of the DLC film during thermal annealing at particular temperature above the graphitization temperature shows blistering and buckling and also delaminates from the substrate. The DLC film shows poor thermal stability at higher temperature.
- Publication:
-
Solid State Physics
- Pub Date:
- June 2012
- DOI:
- 10.1063/1.4710240
- Bibcode:
- 2012AIPC.1447..789M
- Keywords:
-
- annealing;
- atomic force microscopy;
- buckling;
- delamination;
- diamond-like carbon;
- graphitisation;
- surface morphology;
- thermal stability;
- 68.35.B-;
- 68.37.Ps;
- 68.60.Dv;
- 81.05.ug;
- 81.40.Lm;
- Structure of clean surfaces;
- Atomic force microscopy;
- Thermal stability;
- thermal effects;
- Deformation plasticity and creep