Advances in Charge-Compensation in Secondary Ion Mass Spectrometry (SIMS)

In secondary ion mass spectrometry (SIMS), a sample is bombarded by a charged particle beam (the primary ion) and sputtered positive or negative secondary ions are analyzed in a mass spectrometer. When the target is not conducting (like many geological materials), sample charging can result in variable deflection of secondary ions away from the mass spectrometer and a low, unstable, or absent signal. Applying a thin conducting coat (e.g., C, Au) to polished samples is required, and if the primary ion beam is negatively-charged, the build-up of negative charge can be alleviated by secondary electrons draining to the conducting coat at the edge of the crater (if a positive potential is applied to the sample for the collection of positive secondary ions) or accelerated away from the crater (if a negative potential is applied for negative ion study). Unless the sputtered crater in the conducting coat becomes too large, sample charging can be kept at a controllable level, and high-quality trace element analyses and isotope ratios have been obtained using this technique over the past 3+ decades. When a positive primary beam is used, the resulting build-up of positive charge in the sample requires an electron gun to deliver sufficient negative charge to the sputtered crater. While there are many examples of successful analyses using this approach, the purpose of this presentation is to describe a very simple technique for aligning the electron gun on Cameca nf and 1270/80 SIMS instruments. This method allows reproducible analyses of insulating phases with a Cs+ primary beam and detection of negative secondary ions. Normally, the filament voltage on the E-gun is the same as the sample voltage; thus electrons do not strike the sample except when a positive charge has built up (e.g., in the analysis crater!). In this method, we decrease the sample voltage by 3 or more kV, so that the impact energy of the electrons is sufficient to induce a cathodoluminescent (CL) image on an appropriate sample (e.g., GaN). The CL image is made circular and homogeneous by adjusting the deflectors and a lens in the electron steering assembly, and the sample voltage is subsequently returned to the same value as the filament. Very minor corrections of the electron tuning (mostly by an external magnet known as Bx or B1) will then produce a uniform secondary ion image on a test insulator (a gold-coated glass slide) under Cs bombardment. The uniform electron density is correlated with reproducible calibration for hydrogen and carbon concentrations over a multi-day session and from session to session over a period of months. Outside visitors to the lab can use this set-up and obtain high-quality analyses with little to no previous training. Obtaining a homogeneous distribution of electrons over a maximum diameter (100+ microns) also reduces problems associated with changes in the position of the electron beam induced by stray magnetic fields. As a result, analyses of hydrogen isotopes and/or multi-element analysis routines using elemental H species are simplified.