The atomic structure of silica single layer on a Mo(112) substrate was determined by means of low-energy electron diffraction analysis. The best-fit structure was consistent with findings of previous studies [Phys. Rev. Lett. 95 (2005) 076103 and Phys. Rev. Lett. 103 (2009) 017601]. The unit cell is c(2 × 2)-Si2O5 and is composed of a two-dimensional network of SiO4 tetrahedrons. The tetrahedrons incline slightly to fit the silica network on the Mo(112) surface while maintaining the ideal Si-O bond length. Since there are no dangling bonds in the silica network, the surface is very stable even in the atmosphere.