Fabrication of fluidic devices with 30 nm nanochannels by direct imprinting
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- November 2011
- DOI:
- 10.1116/1.3662886
- Bibcode:
- 2011JVSTB..29fF801F