Growth of non-polar GaN on LiGaO2 by plasma-assisted MBE
Abstract
We show that non-polar M-plane and A-plane GaN can be grown on LiGaO2 with very high phase purity. The morphology of the GaN surfaces is influenced by the underlying substrate morphology, which exhibits a high abundance of surface scratches. Nevertheless, the root-mean-square roughness of the samples is low, i.e. 2.9 nm for M-plane GaN and 10 nm for A-plane GaN. The predominant defects in the GaN films are threading dislocations and stacking faults.
- Publication:
-
Journal of Crystal Growth
- Pub Date:
- May 2011
- DOI:
- 10.1016/j.jcrysgro.2010.10.118
- Bibcode:
- 2011JCrGr.323...76S