Microstructure and Electrical Properties of Amorphous {Bi}_{5}{Nb}_{3}{O}_{15} Films Grown on Cu/Ti/ {SiO}_{2}/Si Substrates Using RF Magnetron Sputtering
Abstract
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- May 2011
- DOI:
- 10.1109/TED.2011.2111454
- Bibcode:
- 2011ITED...58.1462K