(Invited) ALD and AVD Grown Perovskite-type Dielectrics for Metal-Insulator-Metal Applications Wenger, Christian ; Lukosius, Mindaugas ; Blomberg, Tom ; Abrutis, Adulfas ; Baumann, Peter ; Ruhl, Guenther Abstract Publication: ECS Transactions Pub Date: October 2011 DOI: 10.1149/1.3633654 Bibcode: 2011ECSTr..41b..53W