Thermally-robust Asymmetric Resonators for Energy Harvesting Applications
Abstract
In this paper, a passive mechanism is proposed for regulating the thermal stress in the beam-type MEMS asymmetric resonators, with application in Energy Harvesting Systems. The finite element model (FEM) demonstrates that by employing this mechanism, one can develop resonators with thermally robust resonance frequencies. Moreover, the FEM shows how different modes of vibrations of the resonator can be excited simultaneously.
- Publication:
-
Advances in Mathematical and Computational Methods: Addressing Modern Challenges of Science, Technology, and Society
- Pub Date:
- November 2011
- DOI:
- 10.1063/1.3663460
- Bibcode:
- 2011AIPC.1368...61H
- Keywords:
-
- micromechanical devices;
- finite element analysis;
- micromachining;
- energy conservation;
- 85.85.+j;
- 02.70.Dh;
- 85.40.Hp;
- 88.05.Gh;
- Micro- and nano-electromechanical systems and devices;
- Finite-element and Galerkin methods;
- Lithography masks and pattern transfer