High-speed growth of YBa2Cu3O7 - δ film with high critical temperature on MgO single crystal substrate by laser chemical vapor deposition

a-axis- and c-axis-oriented YBa₂Cu₃O_{7 - δ} films were prepared on a (100) MgO single crystal substrate by chemical vapor deposition enhanced by a continuous wave Nd:YAG laser. A c-axis-oriented YBCO film with a critical temperature of 89 K was prepared at a high deposition rate of 57 µm h ^{- 1}, about 2-600 times higher than that of conventional chemical vapor deposition.