Chloride-based CVD of 3C-SiC epitaxial layers on 6H(0001) SiC Leone, Stefano ; Beyer, Franziska C. ; Henry, Anne ; Kordina, Olof ; Janzén, Erik Abstract Publication: Physica Status Solidi Rapid Research Letters Pub Date: November 2010 DOI: 10.1002/pssr.201004271 Bibcode: 2010PSSRR...4..305L