Focused chromium ion beam Steele, A. V. ; Knuffman, B. ; McClelland, J. J. ; Orloff, J. Abstract Publication: Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures Pub Date: November 2010 DOI: 10.1116/1.3502668 Bibcode: 2010JVSTB..28F...1S