Design of a parallel mass spectrometer for focused ion beam columns Khursheed, A. ; Cheong, K. H. ; Hoang, H. Q. Abstract Publication: Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures Pub Date: 2010 DOI: 10.1116/1.3497021 Bibcode: 2010JVSTB..28....6K