Investigation on the Retention Reliability of Scaled {SiO}_{2}/{Al}_{x}{O}_{y}/{SiO}_{2} Inter-Poly Dielectrics for nand Flash Cell Arrays
Abstract
- Publication:
-
IEEE Electron Device Letters
- Pub Date:
- April 2010
- DOI:
- Bibcode:
- 2010IEDL...31..266L