Laser scanning systems are extensively applied in laser marking, laser printers, laser projection, and laser coding. They represent a very mature technique in the marking industry, and the galvanometric scanning systems are usually adopted in the laser marking system. Although the galvanometric scanning system usually increases the marking speed, it is usually accompanied by field distortion. The paper gives a correction method for the field distortion of a laser marking system, which, using the surface curve fitting function, corrected the control system of the scanning system. The field distortion errors of the laser marking system are corrected by the surface compensation function, which, using the surface curve fitting method, obtained the corrected position of laser spots. The results in this paper indicate that field-distortion errors of laser marking systems are effectively corrected by the surface compensation function. Moreover, the compensation method would be widely adopted to increase the accuracy of most two-dimensional machine systems, such as XY table, etc.