Measurement of the vibrating shape of a bimorph deformable mirror using a laser displacement sensor
Abstract
A method to characterize the vibrating shape of a bimorph deformable mirror by measurement using a laser displacement sensor is presented. The displacement of the deformable mirror surface at a point is recorded as a frequency response function. The surface profile is synthesized from the response functions obtained at multiple points on a deformable mirror by postprocessing. The method has a wide frequency range and high-frequency resolution, suitable to investigate the resonance behavior of a deformable mirror. Although the spatial resolution is low compared with an interferometer, it is sufficient to identify low-spatial-order shapes at resonance frequencies. The accuracy of the displacement measurement is estimated to be comparable with interferometric data.
- Publication:
-
Optical Engineering
- Pub Date:
- March 2009
- DOI:
- 10.1117/1.3095904
- Bibcode:
- 2009OptEn..48c3601O
- Keywords:
-
- displacement measurement;
- measurement by laser beam;
- mirrors;
- optical sensors;
- optical testing;
- shape measurement;
- vibration measurement