Characterizing the Two- and Three-Dimensional Resolution of an Improved Aberration-Corrected STEM
Abstract
The successful development of third-order aberration correctors in transmission electron microscopy has seen aberration-corrected electron microscopes evolve from specialist projects, custom built at a small number of sites to common instruments in many modern laboratories. Here we describe some initial results illustrating the two- and three-dimensional (3D) performance of an aberration-corrected scanning transmission electron microscope with a prototype improved aberration corrector designed to also minimize fifth-order aberrations and a new, higher brightness gun. We show that atomic columns separated by 0.63 Å can be resolved and demonstrate detection of single dopant atoms with 3D sensitivity.
- Publication:
-
Microscopy and Microanalysis
- Pub Date:
- October 2009
- DOI:
- 10.1017/S1431927609990389
- Bibcode:
- 2009MiMic..15..441L