A Simple Method for Measuring Si-Fin Sidewall Roughness by AFM Tang, Xiaohui ; Bayot, Vincent ; Reckinger, Nicolas ; Flandre, Denis ; Raskin, Jean-Pierre ; Dubois, Emmanuel ; Nysten, Bernard Abstract Publication: IEEE Transactions on Nanotechnology Pub Date: September 2009 DOI: 10.1109/TNANO.2009.2021064 Bibcode: 2009ITNan...8..611T